Inventor
TATENO HIROKI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “TATENO HIROKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
9 patentsUS4908656AMar 13, 1990
Method of dimension measurement for a pattern formed by exposure apparatus, and method for setting exposure conditions and for inspecting exposure precision
NIKON CORP152 citations99
US6876946B2Apr 5, 2005
Alignment method and apparatus therefor
NIKON CORP80 citations98
US6278957B1Aug 21, 2001
Alignment method and apparatus therefor
NIKON CORP116 citations98
US6342941B1Jan 29, 2002
Exposure apparatus and method preheating a mask before exposing; a conveyance method preheating a mask before exposing; and a device manufacturing system and method manufacturing a device according to the exposure apparatus and method
NIKON CORP62 citations96
US5521036AMay 28, 1996
Positioning method and apparatus
NIKON CORP103 citations96
US5596204AJan 21, 1997
Method for aligning processing areas on a substrate with a predetermined position in a static coordinate system
NIKON CORP47 citations92
US4803524AFeb 7, 1989
Method of and apparatus for detecting the accuracy of superposition exposure in an exposure apparatus
NIKON CORP27 citations92
US5666205ASep 9, 1997
Measuring method and exposure apparatus
NIKON CORP25 citations91
US5448333ASep 5, 1995
Exposure method
NIKON CORP36 citations90