Inventor
JOHNSON RICHARD I
US6 patents
Patents
6 patentsUS5366926ANov 22, 1994
Low temperature process for laser dehydrogenation and crystallization of amorphous silicon
XEROX CORP92 citations95
US4310614AJan 12, 1982
Method and apparatus for pretreating and depositing thin films on substrates
XEROX CORP62 citations95
US5733641AMar 31, 1998
Buffered substrate for semiconductor devices
XEROX CORP57 citations92
US5821135AOct 13, 1998
Methods for and applications of making buried structures in semiconductor thin films
XEROX CORP18 citations84
US4269137AMay 26, 1981
Pretreatment of substrates prior to thin film deposition
XEROX CORP25 citations80
US3956042AMay 11, 1976
Selective etchants for thin film devices
XEROX CORP3 citations61