Inventor
STOPKA JAN
CZ4 patents
Patents
4 patentsUS12106933B2Oct 1, 2024
Method to correct first order astigmatism and first order distortion in multi-beam scanning electron microscopes
FEI CO0 citations56
US12380596B2Aug 5, 2025
Method and system for determining beam position
FEI CO0 citations49
US12057287B2Aug 6, 2024
Methods and systems for aligning a multi-beam system
FEI CO0 citations49
US11676795B2Jun 13, 2023
Charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets
FEI CO0 citations46