Inventor
SED'A BOHUSLAV
CZ10 patents
Patents
10 patentsUS9362086B2Jun 7, 2016
In-column detector for particle-optical column
FEI CO7 citations77
US10937627B2Mar 2, 2021
Multi-beam electron microscope
FEI CO2 citations70
US9741525B1Aug 22, 2017
Charged-particle microscope with astigmatism compensation and energy-selection
FEI CO3 citations70
US10784076B2Sep 22, 2020
3D defect characterization of crystalline samples in a scanning type electron microscope
FEI CO4 citations68
US12106933B2Oct 1, 2024
Method to correct first order astigmatism and first order distortion in multi-beam scanning electron microscopes
FEI CO0 citations56
US12380596B2Aug 5, 2025
Method and system for determining beam position
FEI CO0 citations49
US12057287B2Aug 6, 2024
Methods and systems for aligning a multi-beam system
FEI CO0 citations49
US10790113B2Sep 29, 2020
Multi-beam charged particle imaging apparatus
FEI CO0 citations47
US11676795B2Jun 13, 2023
Charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets
FEI CO0 citations46
US9053899B2Jun 9, 2015
Method for imaging a sample in a charged particle apparatus
FEI CO1 citations44