Inventor
SON DUKHYUN
KR9 patents
⚠️ This page may combine multiple inventors who share the name “SON DUKHYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
8 patentsUS12266512B2Apr 1, 2025
Plasma processing apparatus
SEMES CO LTD0 citations61
US12148641B2Nov 19, 2024
Container and substrate treating apparatus
SEMES CO LTD0 citations60
US12087560B2Sep 10, 2024
Apparatus and method for treating substrate
SEMES CO LTD0 citations60
US11295936B2Apr 5, 2022
Apparatus and method for treating substrate
SEMES CO LTD0 citations60
US11699599B2Jul 11, 2023
Substrate transfer apparatus and substrate treating apparatus
SEMES CO LTD0 citations50
US11056367B2Jul 6, 2021
Buffer unit, and apparatus for treating substrate with the unit
SEMES CO LTD0 citations48
US11756817B2Sep 12, 2023
Apparatus and method for processing substrate
SEMES CO LTD0 citations47
US11569110B2Jan 31, 2023
Buffer unit, and apparatus and method for treating substrate with the unit
SEMES CO LTD0 citations47