Inventor
ASHIDA MITSUTOSHI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “ASHIDA MITSUTOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS12237157B2Feb 25, 2025
Plasma measurement method
TOKYO ELECTRON LTD0 citations51
US12444574B2Oct 14, 2025
Plasma processing apparatus, and plasma processing method
TOKYO ELECTRON LTD0 citations50
US11842886B2Dec 12, 2023
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US11569558B2Jan 31, 2023
Directional coupler for use in a substrate processing apparatus, where the directional coupler includes a coaxial line coupled to a conductor on a substrate
TOKYO ELECTRON LTD0 citations50
US11411541B2Aug 9, 2022
High frequency power supply device and high frequency power supply method
TOKYO ELECTRON LTD0 citations48
US10818478B2Oct 27, 2020
High frequency generator and plasma processing apparatus
TOKYO ELECTRON LTD0 citations39
ASHIDA MITSUTOSHI
3 patentsUS9011636B2Apr 21, 2015
Automatic matching method, computer-readable storage medium, automatic matching unit, and plasma processing apparatus
ASHIDA MITSUTOSHI42 citations90
US9337001B2May 10, 2016
Microwave processing apparatus and control method thereof
ASHIDA MITSUTOSHI6 citations69
US9384945B2Jul 5, 2016
Automatic matching unit and plasma processing apparatus
ASHIDA MITSUTOSHI0 citations38