Inventor

TANG THOMAS E

US15 patents

Patents

15 patents

US4657628AApr 14, 1987

Process for patterning local interconnects

TEXAS INSTRUMENTS INC213 citations99

US4975756ADec 4, 1990

SRAM with local interconnect

TEXAS INSTRUMENTS INC181 citations98

US5198387AMar 30, 1993

Method and apparatus for in-situ doping of deposited silicon

TEXAS INSTRUMENTS INC56 citations96

US5043778AAug 27, 1991

Oxide-isolated source/drain transistor

TEXAS INSTRUMENTS INC76 citations96

US5010032AApr 23, 1991

Process for making CMOS device with both P+ and N+ gates including refractory metal silicide and nitride interconnects

TEXAS INSTRUMENTS INC107 citations96

US4963502AOct 16, 1990

Method of making oxide-isolated source/drain transistor

TEXAS INSTRUMENTS INC101 citations96

US4890141ADec 26, 1989

CMOS device with both p+ and n+ gates

TEXAS INSTRUMENTS INC62 citations96

US4788160ANov 29, 1988

Process for formation of shallow silicided junctions

TEXAS INSTRUMENTS INC92 citations96

US4746219AMay 24, 1988

Local interconnect

TEXAS INSTRUMENTS INC68 citations96

US4690730ASep 1, 1987

Oxide-capped titanium silicide formation

TEXAS INSTRUMENTS INC87 citations96

US4676866AJun 30, 1987

Process to increase tin thickness

TEXAS INSTRUMENTS INC67 citations96

US4920073AApr 24, 1990

Selective silicidation process using a titanium nitride protective layer

TEXAS INSTRUMENTS INC67 citations95

US5166770ANov 24, 1992

Silicided structures having openings therein

TEXAS INSTRUMENTS INC12 citations73

US5076206ADec 31, 1991

Vertical LPCVD reactor

TEXAS INSTRUMENTS INC17 citations70

US5101764AApr 7, 1992

Method and apparatus for integrating optical sensor into processor

TEXAS INSTRUMENTS INC6 citations59