Inventor
YAMAMOTO EIICHI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “YAMAMOTO EIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OKAMOTO MACHINE TOOL WORKS
7 patentsUS10964576B2Mar 30, 2021
Electrostatic attachment chuck, method for manufacturing the same, and semiconductor device manufacturing method
OKAMOTO MACHINE TOOL WORKS8 citations79
US12068165B2Aug 20, 2024
Method for manufacturing semiconductor device and apparatus for manufacturing semiconductor device
OKAMOTO MACHINE TOOL WORKS2 citations69
US11745299B2Sep 5, 2023
Grinding method of composite substrate including resin and grinding apparatus thereof
OKAMOTO MACHINE TOOL WORKS0 citations59
US8366514B2Feb 5, 2013
Semiconductor substrate planarization apparatus and planarization method
OKAMOTO MACHINE TOOL WORKS4 citations58
US11980997B2May 14, 2024
Dressing apparatus and polishing apparatus
OKAMOTO MACHINE TOOL WORKS0 citations51
US11735411B2Aug 22, 2023
Method and apparatus for manufacturing semiconductor device
OKAMOTO MACHINE TOOL WORKS0 citations48
US10763171B2Sep 1, 2020
Method of manufacturing semiconductor apparatus
OKAMOTO MACHINE TOOL WORKS0 citations40