Inventor
ROSAKIS ARES J
US13 patents
⚠️ This page may combine multiple inventors who share the name “ROSAKIS ARES J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CALIFORNIA INST OF TECHN
12 patentsUS6600565B1Jul 29, 2003
Real-time evaluation of stress fields and properties in line features formed on substrates
CALIFORNIA INST OF TECHN49 citations95
US6781702B2Aug 24, 2004
Determining large deformations and stresses of layered and graded structures to include effects of body forces
CALIFORNIA INST OF TECHN57 citations93
US6469788B2Oct 22, 2002
Coherent gradient sensing ellipsometer
CALIFORNIA INST OF TECHN60 citations93
US6924497B2Aug 2, 2005
Systems for measuring stresses in line features formed on substrates
CALIFORNIA INST OF TECHN15 citations92
US6268883B1Jul 31, 2001
High speed infrared imaging system and method
CALIFORNIA INST OF TECHN88 citations92
US6031611AFeb 29, 2000
Coherent gradient sensing method and system for measuring surface curvature
CALIFORNIA INST OF TECHN100 citations92
US7990543B1Aug 2, 2011
Surface characterization based on optical phase shifting interferometry
CALIFORNIA INST OF TECHN35 citations89
US7538891B1May 26, 2009
Surface characterization based on lateral shearing of diffracted wave fronts to measure in-plane and out-of-plane displacement gradient fields
CALIFORNIA INST OF TECHN41 citations89
US7966135B2Jun 21, 2011
Characterizing curvatures and stresses in thin-film structures on substrates having spatially non-uniform variations
CALIFORNIA INST OF TECHN13 citations84
US7930113B1Apr 19, 2011
Measuring stresses in multi-layer thin film systems with variable film thickness
CALIFORNIA INST OF TECHN12 citations84
US7363173B2Apr 22, 2008
Techniques for analyzing non-uniform curvatures and stresses in thin-film structures on substrates with non-local effects
CALIFORNIA INST OF TECHN9 citations84
US7487050B2Feb 3, 2009
Techniques and devices for characterizing spatially non-uniform curvatures and stresses in thin-film structures on substrates with non-local effects
CALIFORNIA INST OF TECHN5 citations62