Inventor
JORRITSMA LAURENTIUS CATRINUS
NL14 patents
⚠️ This page may combine multiple inventors who share the name “JORRITSMA LAURENTIUS CATRINUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
13 patentsUS7724351B2May 25, 2010
Lithographic apparatus, device manufacturing method and exchangeable optical element
ASML NETHERLANDS BV12 citations89
US7239373B2Jul 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations83
US7580113B2Aug 25, 2009
Method of reducing a wave front aberration, and computer program product
ASML NETHERLANDS BV12 citations81
US7126672B2Oct 24, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations73
US7221430B2May 22, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations71
US7372633B2May 13, 2008
Lithographic apparatus, aberration correction device and device manufacturing method
ASML NETHERLANDS BV4 citations62
US7332733B2Feb 19, 2008
System and method to correct for field curvature of multi lens array
ASML NETHERLANDS BV4 citations62
US7924406B2Apr 12, 2011
Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels
ASML NETHERLANDS BV3 citations60
US7538952B2May 26, 2009
Lithographic apparatus, aberration correction device and device manufacturing method
ASML NETHERLANDS BV1 citations51
US10429741B2Oct 1, 2019
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
US10151984B2Dec 11, 2018
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
US7671968B2Mar 2, 2010
Lithographic apparatus having masking parts and device manufacturing method
ASML NETHERLANDS BV1 citations50
US7903234B2Mar 8, 2011
Lithographic apparatus, device manufacturing method and computer program product
ASML NETHERLANDS BV0 citations39