Inventor
HEATON JOHN D
US11 patents
Patents
11 patentsUS6982793B1Jan 3, 2006
Method and apparatus for using an alignment target with designed in offset
NANOMETRICS INC216 citations98
US7046361B1May 16, 2006
Positioning two elements using an alignment target with a designed offset
NANOMETRICS INC75 citations97
US6992764B1Jan 31, 2006
Measuring an alignment target with a single polarization state
NANOMETRICS INC115 citations97
US7230705B1Jun 12, 2007
Alignment target with designed in offset
NANOMETRICS INC69 citations95
US6713753B1Mar 30, 2004
Combination of normal and oblique incidence polarimetry for the characterization of gratings
NANOMETRICS INC66 citations94
US6958819B1Oct 25, 2005
Encoder with an alignment target
NANOMETRICS INC28 citations92
US7295314B1Nov 13, 2007
Metrology/inspection positioning system
NANOMETRICS INC38 citations91
US6108077AAug 22, 2000
Sample support with a non-reflecting sample supporting surface
NANOMETRICS INC19 citations91
US6910847B1Jun 28, 2005
Precision polar coordinate stage
NANOMETRICS INC22 citations90
US6970255B1Nov 29, 2005
Encoder measurement based on layer thickness
NANOMETRICS INC15 citations83
US7289215B2Oct 30, 2007
Image control in a metrology/inspection positioning system
NANOMETRICS INC7 citations72