Inventor
GUIDOTTI EMMANUEL P
US7 patents
⚠️ This page may combine multiple inventors who share the name “GUIDOTTI EMMANUEL P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS7459396B2Dec 2, 2008
Method for thin film deposition using multi-tray film precursor evaporation system
TOKYO ELECTRON LTD25 citations92
US7708835B2May 4, 2010
Film precursor tray for use in a film precursor evaporation system and method of using
TOKYO ELECTRON LTD12 citations83
US7638002B2Dec 29, 2009
Multi-tray film precursor evaporation system and thin film deposition system incorporating same
TOKYO ELECTRON LTD14 citations83
US7484315B2Feb 3, 2009
Replaceable precursor tray for use in a multi-tray solid precursor delivery system
TOKYO ELECTRON LTD18 citations83
US7488512B2Feb 10, 2009
Method for preparing solid precursor tray for use in solid precursor evaporation system
TOKYO ELECTRON LTD15 citations81
US7678421B2Mar 16, 2010
Method for increasing deposition rates of metal layers from metal-carbonyl precursors
TOKYO ELECTRON LTD2 citations62