Inventor
DESHMUKH SHASHANK
US12 patents
⚠️ This page may combine multiple inventors who share the name “DESHMUKH SHASHANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS6235214B1May 22, 2001
Plasma etching of silicon using fluorinated gas mixtures
APPLIED MATERIALS INC54 citations95
US6921723B1Jul 26, 2005
Etching method having high silicon-to-photoresist selectivity
APPLIED MATERIALS INC20 citations92
US6402974B1Jun 11, 2002
Method for etching polysilicon to have a smooth surface
APPLIED MATERIALS INC26 citations91
US7504338B2Mar 17, 2009
Method of pattern etching a silicon-containing hard mask
APPLIED MATERIALS INC9 citations83
US6653237B2Nov 25, 2003
High resist-selectivity etch for silicon trench etch applications
APPLIED MATERIALS INC13 citations83
US7368392B2May 6, 2008
Method of fabricating a gate structure of a field effect transistor having a metal-containing gate electrode
APPLIED MATERIALS INC7 citations72
US7780862B2Aug 24, 2010
Device and method for etching flash memory gate stacks comprising high-k dielectric
APPLIED MATERIALS INC2 citations62
US7910488B2Mar 22, 2011
Alternative method for advanced CMOS logic gate etch applications
APPLIED MATERIALS INC1 citations51