Inventor
WHITING CHARLES A
US12 patents
Patents
12 patentsUS6342735B1Jan 29, 2002
Dual use alignment aid
IBM84 citations96
US6735492B2May 11, 2004
Feedback method utilizing lithographic exposure field dimensions to predict process tool overlay settings
IBM61 citations92
US6377334B2Apr 23, 2002
Method for controlling image size of integrated circuits on wafers supported on hot plates during post exposure baking of the wafers
IBM16 citations92
US6235439B1May 22, 2001
Method for controlling image size of integrated circuits on wafers supported on hot plates during post exposure baking of the wafers
IBM19 citations92
US6100506AAug 8, 2000
Hot plate with in situ surface temperature adjustment
IBM123 citations92
US6694498B2Feb 17, 2004
Feed-forward lithographic overlay offset method and system
IBM15 citations82
US6278515B1Aug 21, 2001
Method and apparatus for adjusting a tilt of a lithography tool
IBM16 citations82
US5538151AJul 23, 1996
Recovery of an anodically bonded glass device from a susstrate by use of a metal interlayer
IBM6 citations73
US6606533B1Aug 12, 2003
Method and arrangement for controlling image size of integrated circuits on wafers through post-exposure bake hotplate-specific dose feedback
IBM6 citations62
US6674516B2Jan 6, 2004
Method of photolithographic exposure dose control as a function of resist sensitivity
IBM4 citations60
US6968288B2Nov 22, 2005
Method for detection of photolithographic defocus
IBM5 citations57
US6856378B2Feb 15, 2005
Method of photolithographic exposure dose control as a function of resist sensitivity
IBM0 citations49