Inventor

KIM JA YUL

KR3 patents

⚠️ This page may combine multiple inventors who share the name “KIM JA YUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KIM JA YUL

2 patents

US9287155B2Mar 15, 2016

Apparatus and method of controlling chuck, and exposure apparatus and control method thereof

KIM JA YUL1 citations43

US9069336B2Jun 30, 2015

Ultra-precision position control device and method for determining position and attitude information associated with a 6-degree-of-freedom stage thereof

KIM JA YUL1 citations43

SAMSUNG ELECTRONICS CO LTD

1 patent

US9507272B2Nov 29, 2016

Apparatus and method of controlling chuck, and exposure apparatus and control method thereof

SAMSUNG ELECTRONICS CO LTD0 citations47