Inventor

SON TAE KYU

KR5 patents

⚠️ This page may combine multiple inventors who share the name “SON TAE KYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

2 patents

US6490504B2Dec 3, 2002

Feeding robot and control method therefor

SAMSUNG ELECTRONICS CO LTD12 citations68

US9507272B2Nov 29, 2016

Apparatus and method of controlling chuck, and exposure apparatus and control method thereof

SAMSUNG ELECTRONICS CO LTD0 citations47

KIM JA YUL

2 patents

US9287155B2Mar 15, 2016

Apparatus and method of controlling chuck, and exposure apparatus and control method thereof

KIM JA YUL1 citations43

US9069336B2Jun 30, 2015

Ultra-precision position control device and method for determining position and attitude information associated with a 6-degree-of-freedom stage thereof

KIM JA YUL1 citations43

AHN SUNG MIN

1 patent

US8755034B2Jun 17, 2014

Maskless exposure apparatus and method to determine exposure start position and orientation in maskless lithography

AHN SUNG MIN0 citations38