Inventor
ANDO KAZUTO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “ANDO KAZUTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO OSAKA CEMENT CO LTD
4 patentsUS8358493B2Jan 22, 2013
Electrostatic chuck, production method of electrostatic chuck and electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD10 citations82
US10475688B2Nov 12, 2019
Electrostatic chuck device, and semiconductor manufacturing device
SUMITOMO OSAKA CEMENT CO LTD2 citations71
US10389278B2Aug 20, 2019
Electrostatic chuck device with multiple fine protrusions or multiple fine recesses
SUMITOMO OSAKA CEMENT CO LTD1 citations61
US11024528B2Jun 1, 2021
Electrostatic chuck device having focus ring
SUMITOMO OSAKA CEMENT CO LTD0 citations49