Inventor
LEI TONG
CN4 patents
⚠️ This page may combine multiple inventors who share the name “LEI TONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHANGHAI HUALI MICROELECT CORP
3 patentsUS9449872B1Sep 20, 2016
Method for forming cobalt barrier layer and metal interconnection process
SHANGHAI HUALI MICROELECT CORP6 citations67
US10276450B2Apr 30, 2019
Fabrication technology for metal gate
SHANGHAI HUALI MICROELECT CORP0 citations36
US10038078B2Jul 31, 2018
Integration process of finFET spacer formation
SHANGHAI HUALI MICROELECT CORP0 citations29