Inventor
YANG IL-KWANG
KR16 patents
⚠️ This page may combine multiple inventors who share the name “YANG IL-KWANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EUGENE TECHNOLOGY CO LTD
12 patentsUS9620395B2Apr 11, 2017
Apparatus for processing substrate for supplying reaction gas having phase difference
EUGENE TECHNOLOGY CO LTD9 citations83
US9593415B2Mar 14, 2017
Substrate processing apparatus including auxiliary gas supply port
EUGENE TECHNOLOGY CO LTD7 citations83
US9875895B2Jan 23, 2018
Substrate processing apparatus including exhaust ports and substrate processing method
EUGENE TECHNOLOGY CO LTD5 citations72
US9869019B2Jan 16, 2018
Substrate processing apparatus including processing unit
EUGENE TECHNOLOGY CO LTD3 citations72
US9368380B2Jun 14, 2016
Substrate processing device with connection space
EUGENE TECHNOLOGY CO LTD4 citations72
US9758870B2Sep 12, 2017
Substrate treatment apparatus, and method for controlling temperature of heater
EUGENE TECHNOLOGY CO LTD3 citations71
US10192760B2Jan 29, 2019
Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit
EUGENE TECHNOLOGY CO LTD2 citations69
US10593545B2Mar 17, 2020
Method for substrate processing using exhaust ports
EUGENE TECHNOLOGY CO LTD0 citations51
US9953850B2Apr 24, 2018
Substrate processing apparatus including heat-shield plate
EUGENE TECHNOLOGY CO LTD1 citations51
US9593418B2Mar 14, 2017
Showerhead having cooling system and substrate processing apparatus including the showerhead
EUGENE TECHNOLOGY CO LTD1 citations51
US10622228B2Apr 14, 2020
Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit
EUGENE TECHNOLOGY CO LTD0 citations48
US9644895B2May 9, 2017
Heater moving type substrate processing apparatus
EUGENE TECHNOLOGY CO LTD0 citations40