Inventor
PARK STEPHEN KEETAI
US17 patents
Patents
17 patentsUS6303486B1Oct 16, 2001
Method of fabricating copper-based semiconductor devices using a sacrificial dielectric layer and an unconstrained copper anneal
ADVANCED MICRO DEVICES INC63 citations96
US6100559AAug 8, 2000
Multipurpose graded silicon oxynitride cap layer
ADVANCED MICRO DEVICES INC60 citations96
US6576949B1Jun 10, 2003
Integrated circuit having optimized gate coupling capacitance
ADVANCED MICRO DEVICES INC25 citations92
US6486506B1Nov 26, 2002
Flash memory with less susceptibility to charge gain and charge loss
ADVANCED MICRO DEVICES INC25 citations92
US6355555B1Mar 12, 2002
Method of fabricating copper-based semiconductor devices using a sacrificial dielectric layer
ADVANCED MICRO DEVICES INC42 citations92
US6306758B1Oct 23, 2001
Multipurpose graded silicon oxynitride cap layer
ADVANCED MICRO DEVICES INC22 citations92
US6287917B1Sep 11, 2001
Process for fabricating an MNOS flash memory device
ADVANCED MICRO DEVICES INC50 citations92
US6881665B1Apr 19, 2005
Depth of focus (DOF) for trench-first-via-last (TFVL) damascene processing with hard mask and low viscosity photoresist
ADVANCED MICRO DEVICES INC13 citations83
US6265306B1Jul 24, 2001
Resist flow method for defining openings for conductive interconnections in a dielectric layer
ADVANCED MICRO DEVICES INC16 citations80
US6682978B1Jan 27, 2004
Integrated circuit having increased gate coupling capacitance
ADVANCED MICRO DEVICES INC11 citations74
US6756297B2Jun 29, 2004
Method of fabricating copper-based semiconductor devices using a sacrificial dielectric layer
ADVANCED MICRO DEVICES INC11 citations73
US6232635B1May 15, 2001
Method to fabricate a high coupling flash cell with less silicide seam problem
ADVANCED MICRO DEVICES INC12 citations73
US6107169AAug 22, 2000
Method for fabricating a doped polysilicon feature in a semiconductor device
ADVANCED MICRO DEVICES INC11 citations73
US6410443B1Jun 25, 2002
Method for removing semiconductor ARC using ARC CMP buffing
ADVANCED MICRO DEVICES INC12 citations72
US6265294B1Jul 24, 2001
Integrated circuit having double bottom anti-reflective coating layer
ADVANCED MICRO DEVICES INC8 citations72
US6420104B1Jul 16, 2002
Method of reducing contact size by spacer filling
ADVANCED MICRO DEVICES INC5 citations63
US6265273B1Jul 24, 2001
Method of forming rectangular shaped spacers
ADVANCED MICRO DEVICES INC2 citations62