Inventor
Vedhachalam Deepak
US3 patents
Patents
3 patentsUS10773282B2Sep 15, 2020
Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy
TOKYO ELECTRON LTD45 citations89
US10436717B2Oct 8, 2019
Compositional optical emission spectroscopy for detection of particle induced arcs in a fabrication process
TOKYO ELECTRON LTD7 citations78
US11273469B2Mar 15, 2022
Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy
TOKYO ELECTRON LTD0 citations57