Inventor

HOMMA MASATO

JP6 patents

⚠️ This page may combine multiple inventors who share the name “HOMMA MASATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

5 patents

US10401745B2Sep 3, 2019

HOMMA MASATO

1 patent

US8804099B2Aug 12, 2014

Magnetic supporting mechanism having a movable magnet with a varying width, exposure apparatus with the magnetic supporting mechanism, and device manufacturing method thereof

HOMMA MASATO0 citations28

HOMMA MASATO

CANON KK

Exposure apparatus and article manufacturing method

Exposure apparatus and method of manufacturing article

Exposure apparatus and method of manufacturing article

Exposing apparatus and method for manufacturing article

Exposure apparatus and method of manufacturing article

HOMMA MASATO

Magnetic supporting mechanism having a movable magnet with a varying width, exposure apparatus with the magnetic supporting mechanism, and device manufacturing method thereof