Inventor

IBBOTSON DALE E

US7 patents

⚠️ This page may combine multiple inventors who share the name “IBBOTSON DALE E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AMERICAN TELEPHONE & TELEGRAPH

2 patents

US4918031AApr 17, 1990

Processes depending on plasma generation using a helical resonator

AMERICAN TELEPHONE & TELEGRAPH238 citations98

US4689115AAug 25, 1987

Gaseous etching process

AMERICAN TELEPHONE & TELEGRAPH8 citations71

AT & T BELL LAB

2 patents

US4498953AFeb 12, 1985

Etching techniques

AT & T BELL LAB287 citations97

US4960656AOct 2, 1990

Devices and process for producing devices containing silicon nitride films

AT & T BELL LAB10 citations72

LUCENT TECHNOLOGIES INC

1 patent

US5654903AAug 5, 1997

Method and apparatus for real time monitoring of wafer attributes in a plasma etch process

LUCENT TECHNOLOGIES INC136 citations95

AT & T CORP

1 patent

US5494697AFeb 27, 1996

Process for fabricating a device using an ellipsometric technique

AT & T CORP44 citations90

BELL TELEPHONE LABOR INC

1 patent

US4397711AAug 9, 1983

Crystallographic etching of III-V semiconductor materials

BELL TELEPHONE LABOR INC23 citations81