Inventor
IMATOU SHINJI
JP11 patents
Patents
11 patentsUS6191492B1Feb 20, 2001
Electronic device including a densified region
SEMICONDUCTOR ENERGY LAB52 citations95
US5147822ASep 15, 1992
Plasma processing method for improving a package of a semiconductor device
SEMICONDUCTOR ENERGY LAB57 citations95
US4970366ANov 13, 1990
Laser patterning apparatus and method
SEMICONDUCTOR ENERGY LAB70 citations95
US5283087AFeb 1, 1994
Plasma processing method and apparatus
SEMICONDUCTOR ENERGY LAB25 citations92
US5079031AJan 7, 1992
Apparatus and method for forming thin films
SEMICONDUCTOR ENERGY LAB29 citations92
US5013688AMay 7, 1991
Method of manufacturing a semiconductor using plasma processing
SEMICONDUCTOR ENERGY LAB23 citations92
US4987004AJan 22, 1991
Plasma processing method and apparatus
SEMICONDUCTOR ENERGY LAB22 citations92
US4971667ANov 20, 1990
Plasma processing method and apparatus
SEMICONDUCTOR ENERGY LAB52 citations92
US6756670B1Jun 29, 2004
Electronic device and its manufacturing method
SEMICONDUCTOR ENERGY LAB15 citations83
US5007374AApr 16, 1991
Apparatus for forming thin films in quantity
SEMICONDUCTOR ENERGY LAB10 citations74
US5256483AOct 26, 1993
Plasma processing method and apparatus
SEMICONDUCTOR ENERGY LAB15 citations73