Inventor
BJORKMAN CLAES
US15 patents
⚠️ This page may combine multiple inventors who share the name “BJORKMAN CLAES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS7110629B2Sep 19, 2006
Optical ready substrates
APPLIED MATERIALS INC314 citations99
US6074514AJun 13, 2000
High selectivity etch using an external plasma discharge
APPLIED MATERIALS INC504 citations99
US6716302B2Apr 6, 2004
Dielectric etch chamber with expanded process window
APPLIED MATERIALS INC91 citations98
US6403491B1Jun 11, 2002
Etch method using a dielectric etch chamber with expanded process window
APPLIED MATERIALS INC396 citations97
US6273022B1Aug 14, 2001
Distributed inductively-coupled plasma source
APPLIED MATERIALS INC96 citations97
US6797639B2Sep 28, 2004
Dielectric etch chamber with expanded process window
APPLIED MATERIALS INC63 citations96
US6232236B1May 15, 2001
Apparatus and method for controlling plasma uniformity in a semiconductor wafer processing system
APPLIED MATERIALS INC134 citations96
US6113731ASep 5, 2000
Magnetically-enhanced plasma chamber with non-uniform magnetic field
APPLIED MATERIALS INC152 citations96
US6568346B2May 27, 2003
Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply
APPLIED MATERIALS INC66 citations95
US6387288B1May 14, 2002
High selectivity etch using an external plasma discharge
APPLIED MATERIALS INC31 citations92