Inventor
PINCKNEY DAVID J
US15 patents
⚠️ This page may combine multiple inventors who share the name “PINCKNEY DAVID J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
10 patentsUS6724001B1Apr 20, 2004
Electron beam lithography apparatus with self actuated vacuum bypass valve
IBM79 citations97
US6806943B2Oct 19, 2004
Mask clamping device
IBM24 citations89
US7854202B2Dec 21, 2010
Overhead transport service vehicle and method
IBM14 citations82
US7591624B2Sep 22, 2009
Reticle storage pod (RSP) transport system utilizing FOUP adapter plate
IBM8 citations82
US7887277B2Feb 15, 2011
Reticle storage pod (RSP) transport system utilizing FOUP adapter plate
IBM6 citations72
US6960772B1Nov 1, 2005
Mask carrier
IBM11 citations71
US5843623ADec 1, 1998
Low profile substrate ground probe
IBM4 citations62
US6246053B1Jun 12, 2001
Non-contact autofocus height detector for lithography systems
IBM3 citations60
US6818906B1Nov 16, 2004
Electron beam position reference system
IBM1 citations48
US6908255B2Jun 21, 2005
Remote clamping mechanism via vacuum feedthrough
IBM1 citations45
NIKON CORP
3 patentsUS6414313B1Jul 2, 2002
Multiple numerical aperture electron beam projection lithography system
NIKON CORP15 citations84
US6615481B1Sep 9, 2003
Method for fabrication of electromagnetic coil vanes
NIKON CORP10 citations73
US6461680B2Oct 8, 2002
Simplified fabrication method of toroidal charged particle deflector vanes
NIKON CORP5 citations62