Inventor
PARSONS RICHARD
US16 patents
⚠️ This page may combine multiple inventors who share the name “PARSONS RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
14 patentsUS6535785B2Mar 18, 2003
System and method for monitoring and controlling gas plasma processes
TOKYO ELECTRON LTD163 citations99
US6332961B1Dec 25, 2001
Device and method for detecting and preventing arcing in RF plasma systems
TOKYO ELECTRON LTD147 citations99
US6313584B1Nov 6, 2001
Electrical impedance matching system and method
TOKYO ELECTRON LTD193 citations99
US6351683B1Feb 26, 2002
System and method for monitoring and controlling gas plasma processes
TOKYO ELECTRON LTD105 citations98
US7164236B2Jan 16, 2007
Method and apparatus for improved plasma processing uniformity
TOKYO ELECTRON LTD66 citations97
US6917204B2Jul 12, 2005
Addition of power at selected harmonics of plasma processor drive frequency
TOKYO ELECTRON LTD65 citations95
US7102292B2Sep 5, 2006
Method and device for removing harmonics in semiconductor plasma processing systems
TOKYO ELECTRON LTD38 citations92
US6884635B2Apr 26, 2005
Control of power delivered to a multiple segment inject electrode
TOKYO ELECTRON LTD42 citations92
US7214289B2May 8, 2007
Method and apparatus for wall film monitoring
TOKYO ELECTRON LTD6 citations74
US7154256B2Dec 26, 2006
Integrated VI probe
TOKYO ELECTRON LTD9 citations71
US7158845B2Jan 2, 2007
Man-machine interface for monitoring and controlling a process
TOKYO ELECTRON LTD7 citations70
US7177781B2Feb 13, 2007
Method and system for electron density measurement
TOKYO ELECTRON LTD2 citations56
US7732227B2Jun 8, 2010
Method and apparatus for wall film monitoring
TOKYO ELECTRON LTD1 citations52
US7216067B2May 8, 2007
Non-linear test load and method of calibrating a plasma system
TOKYO ELECTRON LTD0 citations51