Inventor
NEUMEIER KARL
DE6 patents
Patents
6 patentsUS7273763B1Sep 25, 2007
Method of producing a micro-electromechanical element
FRAUNHOFER GES FORSCHUNG20 citations90
US6451668B1Sep 17, 2002
Method of producing calibration structures in semiconductor substrates
FRAUNHOFER GES FORSCHUNG42 citations90
US6518084B1Feb 11, 2003
Method of producing a micromechanical structure for a micro-electromechanical element
FRAUNHOFER GES FORSCHUNG36 citations88
US11467115B2Oct 11, 2022
Fluid sensor
FRAUNHOFER GES FORSCHUNG1 citations54
US11167981B2Nov 9, 2021
Semiconductor device and method of producing a semiconductor device
FRAUNHOFER GES FORSCHUNG0 citations53
US10519034B2Dec 31, 2019
Semiconductor device and method of producing a semiconductor device
FRAUNHOFER GES FORSCHUNG0 citations43