Inventor
BOLLMANN DIETER
DE7 patents
⚠️ This page may combine multiple inventors who share the name “BOLLMANN DIETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FRAUNHOFER GES FORSCHUNG
6 patentsUS5279703AJan 18, 1994
Process for the thin etching of substrates
FRAUNHOFER GES FORSCHUNG30 citations91
US7273763B1Sep 25, 2007
Method of producing a micro-electromechanical element
FRAUNHOFER GES FORSCHUNG20 citations90
US6451668B1Sep 17, 2002
Method of producing calibration structures in semiconductor substrates
FRAUNHOFER GES FORSCHUNG42 citations90
US6518084B1Feb 11, 2003
Method of producing a micromechanical structure for a micro-electromechanical element
FRAUNHOFER GES FORSCHUNG36 citations88
US7667945B2Feb 23, 2010
Bipolar carrier wafer and mobile bipolar electrostatic wafer arrangement
FRAUNHOFER GES FORSCHUNG9 citations80
US9978626B2May 22, 2018
Carrier wafer, method for holding a flexible substrate and method for the manufacture of a carrier wafer
FRAUNHOFER GES FORSCHUNG0 citations51