Inventor
MELNYCHUK STEPHAN T
US6 patents
⚠️ This page may combine multiple inventors who share the name “MELNYCHUK STEPHAN T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
5 patentsUS6972421B2Dec 6, 2005
Extreme ultraviolet light source
CYMER INC141 citations97
US6815700B2Nov 9, 2004
Plasma focus light source with improved pulse power system
CYMER INC113 citations97
US6566668B2May 20, 2003
Plasma focus light source with tandem ellipsoidal mirror units
CYMER INC131 citations97
US7368741B2May 6, 2008
Extreme ultraviolet light source
CYMER INC65 citations96
US6586757B2Jul 1, 2003
Plasma focus light source with active and buffer gas control
CYMER INC139 citations96