Inventor
BANERJEE SOUVIK
US9 patents
⚠️ This page may combine multiple inventors who share the name “BANERJEE SOUVIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
4 patentsUS6848458B1Feb 1, 2005
Apparatus and methods for processing semiconductor substrates using supercritical fluids
NOVELLUS SYSTEMS INC162 citations98
US7503334B1Mar 17, 2009
Apparatus and methods for processing semiconductor substrates using supercritical fluids
NOVELLUS SYSTEMS INC49 citations95
US6800142B1Oct 5, 2004
Method for removing photoresist and post-etch residue using activated peroxide followed by supercritical fluid treatment
NOVELLUS SYSTEMS INC57 citations94
US6905556B1Jun 14, 2005
Method and apparatus for using surfactants in supercritical fluid processing of wafers
NOVELLUS SYSTEMS INC19 citations82