Inventor
JUAREZ FRANCISCO
US10 patents
⚠️ This page may combine multiple inventors who share the name “JUAREZ FRANCISCO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
7 patentsUS6848458B1Feb 1, 2005
Apparatus and methods for processing semiconductor substrates using supercritical fluids
NOVELLUS SYSTEMS INC162 citations98
US6550484B1Apr 22, 2003
Apparatus for maintaining wafer back side and edge exclusion during supercritical fluid processing
NOVELLUS SYSTEMS INC91 citations97
US7503334B1Mar 17, 2009
Apparatus and methods for processing semiconductor substrates using supercritical fluids
NOVELLUS SYSTEMS INC49 citations95
US6951765B1Oct 4, 2005
Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactor
NOVELLUS SYSTEMS INC28 citations91
US7695597B1Apr 13, 2010
Conductive planarization assembly for electrochemical mechanical planarization of a work piece
NOVELLUS SYSTEMS INC8 citations84
US7391086B1Jun 24, 2008
Conductive contacts and methods for fabricating conductive contacts for elctrochemical planarization of a work piece
NOVELLUS SYSTEMS INC4 citations62
US7700155B1Apr 20, 2010
Method and apparatus for modulation of precursor exposure during a pulsed deposition process
NOVELLUS SYSTEMS INC2 citations60