Inventor
MUEHLBEYER MICHAEL
DE19 patents
⚠️ This page may combine multiple inventors who share the name “MUEHLBEYER MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
9 patentsUS6897599B2May 24, 2005
System for damping oscillations
ZEISS CARL SMT AG20 citations92
US6867913B2Mar 15, 2005
6-mirror microlithography projection objective
ZEISS CARL SMT AG31 citations92
US6844994B2Jan 18, 2005
Optical element deformation system
ZEISS CARL SMT AG34 citations92
US7304717B2Dec 4, 2007
Imaging device in a projection exposure facility
ZEISS CARL SMT AG12 citations91
US7603010B2Oct 13, 2009
Device consisting of at least one optical element
ZEISS CARL SMT AG10 citations84
US6700715B2Mar 2, 2004
Oscillation damping system
ZEISS CARL SMT AG16 citations84
US7486382B2Feb 3, 2009
Imaging device in a projection exposure machine
ZEISS CARL SMT AG8 citations82
US7710542B2May 4, 2010
Imaging device in a projection exposure machine
ZEISS CARL SMT AG7 citations72
US7684125B2Mar 23, 2010
Diaphragm changing device
ZEISS CARL SMT AG4 citations59