Inventor
AHN SANG
US4 patents
Patents
4 patentsUS6853043B2Feb 8, 2005
Nitrogen-free antireflective coating for use with photolithographic patterning
APPLIED MATERIALS INC41 citations91
US7080528B2Jul 25, 2006
Method of forming a phosphorus doped optical core using a PECVD process
APPLIED MATERIALS INC7 citations72
US7325419B2Feb 5, 2008
Method of forming a phosphorus doped optical core using a PECVD process
APPLIED MATERIALS INC1 citations61
US7383702B2Jun 10, 2008
Method of forming a phosphorus doped optical core using a PECVD process
APPLIED MATERIALS INC0 citations51