Inventor

BAMBA YOSHIO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “BAMBA YOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

2 patents

US7589833B2Sep 15, 2009

Foreign matter inspection apparatus and foreign matter inspection method

HITACHI HIGH TECH CORP4 citations57

US7876431B2Jan 25, 2011

Foreign matter inspection apparatus and foreign matter inspection method

HITACHI HIGH TECH CORP0 citations47

BAMBA YOSHIO

2 patents

US9097686B2Aug 4, 2015

Optical type inspection apparatus, inspection system and the wafer for coordinates management

BAMBA YOSHIO2 citations49

US8625089B2Jan 7, 2014

Foreign matter inspection apparatus and foreign matter inspection method

BAMBA YOSHIO0 citations43