Inventor
NOZAWA SHIGEHISA
JP5 patents
⚠️ This page may combine multiple inventors who share the name “NOZAWA SHIGEHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
3 patentsUS7589833B2Sep 15, 2009
Foreign matter inspection apparatus and foreign matter inspection method
HITACHI HIGH TECH CORP4 citations57
US7847928B2Dec 7, 2010
Inspection device and inspection method
HITACHI HIGH TECH CORP0 citations50
US7876431B2Jan 25, 2011
Foreign matter inspection apparatus and foreign matter inspection method
HITACHI HIGH TECH CORP0 citations47