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Inventor
PANTELEIT FRIEDHELM
DE
2 patents
⚠️ This page may combine multiple inventors who share the name “PANTELEIT FRIEDHELM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL NTS GMBH
1 patent
US7645989B2
Jan 12, 2010
Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof
ZEISS CARL NTS GMBH
13 citations
79
BIHR JOHANNES
1 patent
US8058614B2
Nov 15, 2011
Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof
BIHR JOHANNES
1 citations
42