Inventor
BURKHARDT MARTIN
US22 patents
⚠️ This page may combine multiple inventors who share the name “BURKHARDT MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
11 patentsUS6964032B2Nov 8, 2005
Pitch-based subresolution assist feature design
IBM26 citations92
US9551924B2Jan 24, 2017
Structure and method for fixing phase effects on EUV mask
IBM26 citations88
US11301748B2Apr 12, 2022
Automatic feature extraction from aerial images for test pattern sampling and pattern coverage inspection for lithography
IBM11 citations85
US10539881B1Jan 21, 2020
Generation of hotspot-containing physical design layout patterns
IBM15 citations85
US10706200B2Jul 7, 2020
Generative adversarial networks for generating physical design layout patterns of integrated multi-layers
IBM9 citations84
US10699055B2Jun 30, 2020
Generative adversarial networks for generating physical design layout patterns
IBM9 citations84
US10621302B2Apr 14, 2020
Classification and localization of hotspots in integrated physical design layouts
IBM9 citations84
US10012898B2Jul 3, 2018
EUV mask for monitoring focus in EUV lithography
IBM4 citations72
US9588440B2Mar 7, 2017
Method for monitoring focus in EUV lithography
IBM3 citations72
US8927198B2Jan 6, 2015
Method to print contact holes at high resolution
IBM0 citations52
US9921466B2Mar 20, 2018
Method for monitoring focus in EUV lithography
IBM0 citations51