Inventor
BART STEPHEN F
US9 patents
⚠️ This page may combine multiple inventors who share the name “BART STEPHEN F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
5 patentsUS10107315B2Oct 23, 2018
MEMS pressure sensors with integrated baffles
MKS INSTR INC3 citations72
US9850123B2Dec 26, 2017
Stress relief MEMS structure and package
MKS INSTR INC3 citations72
US10458870B2Oct 29, 2019
Pressure sensor with real time health monitoring and compensation
MKS INSTR INC1 citations57
US9499393B2Nov 22, 2016
Stress relief MEMS structure and package
MKS INSTR INC1 citations51
US9562820B2Feb 7, 2017
Pressure sensor with real time health monitoring and compensation
MKS INSTR INC1 citations49