Inventor

LIN SU-HORNG

TW24 patents

⚠️ This page may combine multiple inventors who share the name “LIN SU-HORNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LIN SU-HORNG

TAIWAN SEMICONDUCTOR MFG CO LTD

Mechanisms for supplying process gas into wafer process apparatus

Cluster tool techniques with improved efficiency

Metrology method

Metrology method

Mechanisms for supplying process gas into wafer process apparatus

Interface tool

Semiconductor manufacturing system and control method

Semiconductor device and fabricating method thereof

Semiconductor manufacturing system and control method

Metrology device and metrology method thereof

Bottom-up PEALD proces

Method of manufacturing a semiconductor structure

Method of forming a singe metal that performs N and P work functions in high-K/metal gate devices

Bottom-up PEALD process

Cluster tool techniques with improved efficiency

Method for curing flowable layer

Layer by layer electro chemical plating (ECP) process

TAIWAN SEMICONDUCTOR MFG

Reliability improvement of SiOC etch with trimethylsilane gas passivation in Cu damascene interconnects

Methods of forming tungsten contacts by chemical vapor deposition

Semiconductor structure and manufacuturing method of the same

N/P metal crystal orientation for high-k metal gate Vt modulation

Method of forming a single metal that performs N and P work functions in high-K/metal gate devices

LIN SU-HORNG

Methods of fabricating metal hard masks

Method of forming a single metal that performs N and P work functions in high-K/metal gate devices