Inventor
PEETHALA CORNELIUS B
US12 patents
⚠️ This page may combine multiple inventors who share the name “PEETHALA CORNELIUS B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
11 patentsUS9685406B1Jun 20, 2017
Selective and non-selective barrier layer wet removal
IBM34 citations94
US10090247B1Oct 2, 2018
Semiconductor device formed by wet etch removal of Ru selective to other metals
IBM13 citations84
US10002831B2Jun 19, 2018
Selective and non-selective barrier layer wet removal
IBM7 citations84
US9806023B1Oct 31, 2017
Selective and non-selective barrier layer wet removal
IBM8 citations84
US10699945B2Jun 30, 2020
Back end of line integration for interconnects
IBM5 citations73
US9881833B1Jan 30, 2018
Barrier planarization for interconnect metallization
IBM6 citations73
US10832917B2Nov 10, 2020
Low oxygen cleaning for CMP equipment
IBM3 citations68
US11094527B2Aug 17, 2021
Wet clean solutions to prevent pattern collapse
IBM0 citations62
US10242909B2Mar 26, 2019
Wet etch removal of Ru selective to other metals
IBM1 citations62
US11004735B2May 11, 2021
Conductive interconnect having a semi-liner and no top surface recess
IBM0 citations52
US10242872B2Mar 26, 2019
Rework of patterned dielectric and metal hardmask films
IBM0 citations52