Inventor
NAMIOKA ICHIRO
JP3 patents
Patents
3 patentsUS10108162B2Oct 23, 2018
Processing device group controller, manufacturing process system, processing device group control method, manufacturing optimization system, manufacturing optimization device, and manufacturing optimization method
TOKYO ELECTRON LTD8 citations81
US10012980B2Jul 3, 2018
Modifying operational efficiency by repositioning process apparatus
TOKYO ELECTRON LTD2 citations69
US9412256B2Aug 9, 2016
System for monitoring failure of substrate processing apparatus, and method for monitoring failure of substrate processing apparatus
TOKYO ELECTRON LTD2 citations55