Inventor
IIJIMA TOSHIHIKO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “IIJIMA TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS6874638B2Apr 5, 2005
Wafer cassette
TOKYO ELECTRON LTD28 citations92
US7283890B2Oct 16, 2007
Work convey system, unmanned convey vehicle system, unmanned convey vehicle, and work convey method
TOKYO ELECTRON LTD15 citations84
US7457680B2Nov 25, 2008
Conveyance method for transporting objects
TOKYO ELECTRON LTD10 citations83
US10108162B2Oct 23, 2018
Processing device group controller, manufacturing process system, processing device group control method, manufacturing optimization system, manufacturing optimization device, and manufacturing optimization method
TOKYO ELECTRON LTD8 citations81
US5892686AApr 6, 1999
Wafer prober system
TOKYO ELECTRON LTD8 citations72
US10012980B2Jul 3, 2018
Modifying operational efficiency by repositioning process apparatus
TOKYO ELECTRON LTD2 citations69
US7458469B2Dec 2, 2008
Substrate transfer apparatus and method, and storage medium
TOKYO ELECTRON LTD5 citations62
US5034684AJul 23, 1991
Probe device and method of controlling the same
TOKYO ELECTRON LTD4 citations59
US7826918B2Nov 2, 2010
Transfer system and transfer method of object to be processed
TOKYO ELECTRON LTD2 citations56