Inventor
TODATE SHIGENORI
JP3 patents
Patents
3 patentsUS6269279B1Jul 31, 2001
Control system
TOKYO ELECTRON LTD52 citations89
US10108162B2Oct 23, 2018
Processing device group controller, manufacturing process system, processing device group control method, manufacturing optimization system, manufacturing optimization device, and manufacturing optimization method
TOKYO ELECTRON LTD8 citations81
US10012980B2Jul 3, 2018
Modifying operational efficiency by repositioning process apparatus
TOKYO ELECTRON LTD2 citations69