Inventor
KHUMPUANG SOMMAWAN
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KHUMPUANG SOMMAWAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIST
9 patentsUS11686479B2Jun 27, 2023
Encapsulated cleanroom system
AIST0 citations61
US10186489B2Jan 22, 2019
Process substrate with crystal orientation mark, method of detecting crystal orientation, and reading device of crystal orientation mark
AIST0 citations51
US11056410B2Jul 6, 2021
Method of manufacturing semiconductor package using alignment mark on wafer
AIST0 citations47
US10163674B2Dec 25, 2018
Circular support substrate for semiconductor
AIST0 citations47
US10163819B2Dec 25, 2018
Surface mount package and manufacturing method thereof
AIST0 citations47
US10431446B2Oct 1, 2019
Wet processing apparatus
AIST0 citations41
US10304675B2May 28, 2019
System for integrating preceding steps and subsequent steps
AIST0 citations36
US10478867B2Nov 19, 2019
Treatment liquid supply device using syringe, and wet treatment device
AIST0 citations32
US10286426B2May 14, 2019
Columnar laminar flow generation device and method for generating columnar laminar flows
AIST0 citations31