Inventor

YEN CHIANG-LANG

TW2 patents

Patents

2 patents

US6610571B1Aug 26, 2003

Approach to prevent spacer undercut by low temperature nitridation

TAIWAN SEMICONDUCTOR MFG18 citations89

US6916718B2Jul 12, 2005

Approach to prevent undercut of oxide layer below gate spacer through nitridation

TAIWAN SEMICONDUCTOR MFG6 citations71