Inventor
SHIBATA AKINORI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “SHIBATA AKINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIPPON ITF INC
3 patentsUS11247903B2Feb 15, 2022
Coating film, method for manufacturing same, and PVD apparatus
NIPPON ITF INC2 citations69
US11261519B2Mar 1, 2022
Coating film, manufacturing method therefor, and PVD apparatus
NIPPON ITF INC0 citations60
US10457885B2Oct 29, 2019
Coating film, manufacturing method for same, and PVD device
NIPPON ITF INC0 citations39