P

Inventor

ROESCH MATTHIAS

DE6 patents
⚠️ This page may combine multiple inventors who share the name “ROESCH MATTHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

4 patents
US10001631B2Jun 19, 2018

Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element

ZEISS CARL SMT GMBH6 citations70
US11531272B2Dec 20, 2022

Pupil stop for an illumination optical unit of a metrology system

ZEISS CARL SMT GMBH0 citations58
US10054860B2Aug 21, 2018

Projection exposure apparatus with optimized adjustment possibility

ZEISS CARL SMT GMBH0 citations50
US9052609B2Jun 9, 2015

Projection exposure apparatus with optimized adjustment possibility

ZEISS CARL SMT GMBH0 citations50

BITTNER BORIS

2 patents
US8203696B2Jun 19, 2012

Projection exposure apparatus with optimized adjustment possibility

BITTNER BORIS20 citations89
US9354524B2May 31, 2016

Projection exposure apparatus with optimized adjustment possibility

BITTNER BORIS1 citations59