Inventor
BANDA SUMANTH
US21 patents
⚠️ This page may combine multiple inventors who share the name “BANDA SUMANTH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
20 patentsUS10570257B2Feb 25, 2020
Copolymerized high temperature bonding component
APPLIED MATERIALS INC35 citations94
US8982530B2Mar 17, 2015
Methods and apparatus toward preventing ESC bonding adhesive erosion
APPLIED MATERIALS INC8 citations84
US9610591B2Apr 4, 2017
Showerhead having a detachable gas distribution plate
APPLIED MATERIALS INC8 citations83
US9358702B2Jun 7, 2016
Temperature management of aluminium nitride electrostatic chuck
APPLIED MATERIALS INC14 citations83
US10745805B2Aug 18, 2020
Plasma resistant coating of porous body by atomic layer deposition
APPLIED MATERIALS INC10 citations82
US9850591B2Dec 26, 2017
High purity aluminum top coat on substrate
APPLIED MATERIALS INC2 citations73
US9447365B2Sep 20, 2016
Enhanced cleaning process of chamber used plasma spray coating without damaging coating
APPLIED MATERIALS INC3 citations73
US11130142B2Sep 28, 2021
Showerhead having a detachable gas distribution plate
APPLIED MATERIALS INC1 citations72
US10847402B2Nov 24, 2020
Bond protection around porous plugs
APPLIED MATERIALS INC4 citations72
US10625277B2Apr 21, 2020
Showerhead having a detachable gas distribution plate
APPLIED MATERIALS INC2 citations72
US11380572B2Jul 5, 2022
Substrate support carrier with improved bond layer protection
APPLIED MATERIALS INC4 citations71
US10975469B2Apr 13, 2021
Plasma resistant coating of porous body by atomic layer deposition
APPLIED MATERIALS INC3 citations71
US10899892B2Jan 26, 2021
Copolymerized high temperature bonding component
APPLIED MATERIALS INC0 citations62
US12033881B2Jul 9, 2024
Reduced localized force in electrostatic chucking
APPLIED MATERIALS INC0 citations61
US11651987B2May 16, 2023
Substrate support carrier with improved bond layer protection
APPLIED MATERIALS INC0 citations61
US12397330B2Aug 26, 2025
Condition selectable backside gas
APPLIED MATERIALS INC0 citations60
US11666952B2Jun 6, 2023
Condition selectable backside gas
APPLIED MATERIALS INC1 citations60
US12094716B2Sep 17, 2024
Chambers and coatings for reducing backside damage
APPLIED MATERIALS INC0 citations57
US10774436B2Sep 15, 2020
High purity aluminum top coat on substrate
APPLIED MATERIALS INC0 citations52
US9597734B2Mar 21, 2017
Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof
APPLIED MATERIALS INC0 citations51