Inventor
KUPERS MICHIEL
NL12 patents
⚠️ This page may combine multiple inventors who share the name “KUPERS MICHIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS10281825B2May 7, 2019
Method of sequencing lots for a lithographic apparatus
ASML NETHERLANDS BV16 citations82
US11774862B2Oct 3, 2023
Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus
ASML NETHERLANDS BV4 citations72
US11175591B2Nov 16, 2021
Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus
ASML NETHERLANDS BV2 citations70
US10877381B2Dec 29, 2020
Methods of determining corrections for a patterning process
ASML NETHERLANDS BV1 citations70
US12044981B2Jul 23, 2024
Method and apparatus for optimization of lithographic process
ASML NETHERLANDS BV1 citations60
US11099487B2Aug 24, 2021
Method and apparatus for optimization of lithographic process
ASML NETHERLANDS BV0 citations60
US11782349B2Oct 10, 2023
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11592753B2Feb 28, 2023
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11327407B2May 10, 2022
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US10908512B2Feb 2, 2021
Methods of controlling a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations50